Cleanroom

New! 360° Panorama views of the cleanrooms are  avialable now. (Quicktime movie needed)

MOCVD/HVPE Cleanroom (mov, 1,2 MB)
Processing room (mov, 1,2 MB)
Lithography room (mov, 1,1 MB)
Etch room (mov, 1,1 MB)
XRD room (mov, 1 MB)

The AMS Department several ISO class 7 cleanrooms.

Big Cleanroom (ISO 7 Class)
Cleanroom (ISO 7 Class)
Big Cleanroom (ISO 7 Class) from other side
Cleanroom (ISO 7 Class) from other side
Lithography room (ISO 6 Class)
Lithography room (ISO 6 Class)
Processing room (ISO 7 Class)
Processing room (ISO 7 Class)