Applied Materials Science Labs

The Applied Materials Science (AMS) department conducts research on III-V compound semiconductors. The department houses clean rooms, characterisation equipment and facilities for solar energy analysis.

Cleanrooms & equipment

The AMS Lab facilities include several clean rooms with two AIX200 MOVPE reactors for the growth of GaAs and InP based III-V semiconductor structures. There is a photo-lithography laboratory with all the necessary equipment (e-gun deposition equipment, spin coater, mask aligner, RTA etc.) while another part of the cleanroom is especially dedicated to wet chemical etching studies related to the development of Epitaxial Lift-Off (ELO) technology.

A large range of characterisation techniques is available (optical microscopy and surface profiling, XRD, PL, Hall, C-V, I-V) or easy accessible within other departments.

Photo researchers working in AMS processing room


  • Big Cleanroom (ISO 7 Class)
  • Photo-lithography room (ISO 6 Class)
  • Processing room (ISO 7 Class)
  • Etch room
  • XRD room
Photo researcher working with AMS laser cutter

Characterisation equipment

  • X-Ray Diffraction (also see the SSC X-Ray Diffraction Lab)
  • Optical surface Profiling
  • Stylus surface profiling
  • CV profiling
  • Hall Measurements
  • Photo etching (defect revealing)
  • Laser cutter
  • MOVPE reactor

Solar Cell Research Facility & Thin Film Growth Lab

You can find information on the facilities for solar cell research on their seperate page:

Solar Cell Research Facility

Contact & Access

Internal users can reserve through the booking platform.


Visiting address

Huygens building, room 03.523
Heyendaalseweg 135
6525 AJ Nijmegen


More information?

Contact dr. John Schermer (clean rooms) or prof. Alexey Kimel (laser laboratories).

024-365 3353

Contact department