Semiconductor Growth and Processing Facilities

The Applied Materials Science lab facilities include interconnected clean rooms (Class ISO 6&7) with all necessary equipment for the growth, processing, and analysis of semiconductor materials and devices.


The focus is on the development of record performance III-V semiconductor materials and devices (PV cells and LEDs), for which the group has established an extended toolbox of processing recipes. For performance testing of the high efficiency solar cells produced in the proof of concept line operated in the clean room AMS runs the Solar Energy Calibration Facilities.

As a unique capability there is dedicated tooling and expertise to produce flexible and low-weight thin-film III-V devices by the application of the Epitaxial Lift-Off (ELO) technology that was developed by AMS. Also there is additional tooling and expertise to produce structures based on other materials (eg. Si, Ge or diamond).  


Materials & device processing

  • MOVPE reactors for epitaxial growth of III-V based materials (max. 2”);
  • Evaporator for metallisation & dielectric coatings;
  • Fume-hoods for wet chemical processing;
  • Dedicated tooling for ELO and substrate removal;
  • Mask aligners, spin-coaters etc. for photo-lithography (upto 4”);
  • Anneal ovens and RTA for metal (inter)-diffusion;
  • Wafer and wire bonders for thin-film transfer & device (inter)-connect.
Materials & device analysis

Materials & device analysis 

  • X-ray diffraction (also see SSC X-Ray Diffraction Lab);
  • Optical microscopy;
  • Optical and stylus surface profiling;
  • PL and CL analyses;
  • Hall measurements & CV profiling;
  • Contact resistance analysis;
  • Dark IV analyses.

Contact & Access

Internal users can reserve through the booking platform.


Visiting address

Huygens building, room 03.523
Heyendaalseweg 135
6525 AJ Nijmegen


More information?

Contact dr. John Schermer (clean rooms) or prof. Alexey Kimel (laser laboratories).

024-365 3353

Contact department